Microplasma

The Surface Micro Discharge (SMD) Technology, developed and extensively tested at the Max Planck Institute for Extraterrestrial Physics, enables the production of cost-effective, flexible and scalable electrodes [Morfill et al. NJP 2009].

The structure of these SMD electrodes consists of

  • one continuous electrode,
  • an insulating layer
  • and an additional grounded structured electrode.


By applying high voltage, microdischarges with dimensions of a few millimeters produce the plasma above the structered electrode (patent "Electrode arrangement for generating a non-thermal plasma" in Japan, patent application "Electrode arrangement for generating a non-thermal plasma" in Europe, USA and China).

Based on its flexibility and scalability the SMD technology enables the development of small, handy, battery-powered devices as well as bigger electrodes for the treatment of extensive areas or volumes. The size can be adapted to your requests.

Meanwhile, we are able to produce thin plasma layers - so-called thin-film electrodes - which can be operated with low voltages and therefore simplify the miniaturization. This technology allows the development of innovative and cost-effective products for professional use as well as for the end-consumer (patent application "Elektrodenanordnung und Plasmaquelle zur Erzeugung eines nichtthermischen Plasmas sowie ein Verfahren zum Betreiben einer Plasmaquelle" in Germany).

Microplasma/